Standard Robots and ZJL Robot have partnered with Innowave Tech, a Singapore-based industrial AI technology company, to jointly create a fully automatic manufacturing solution for the semiconductor industry.

Oasis series is expanding its range of mobile robots with a sequence of vehicles for transporting and moving silicon wafers, called compound robots or SRA modules. 

These AMRs (Autonomous Mobile Robots) are ideal for semiconductor production flows (such as PCB assembly or silicon wafer processes) to feed the line with WIP materials or finished products, all while considering information analysis, predictive maintenance, and improving rapid decision making.

Intelligent material handling solution for circuit probe processes

This project is a material distribution plan for the wafer workshop of Innowave Tech Pte. Ltd. The material is placed in a wafer cassette (FOUP) and distributed to each machine for processing according to the designed production flow. Integrated with the MES system, the material distribution request is sent through the MES. AMR is then called to transport the wafer cassette to the corresponding prober machine under the control of Standard Robots' Fleet Manamgnet System.

The new Oasis 600C-SRA is designed to pick up, drop off, and deliver multiple types of FOUP, such as the common 12" FOUP, 6" to 8" cassettes with 13 slots, and 12kg (full load) frame cassettes, in varied CP testing of wafers in the semiconductor production process. The 600C-SRA maximizes productivity and safety while maintaining a consistent supply of materials at each station, managing complex processes, optimizing timings, and regulating flow and inventory to avoid potential human errors and save costs and time.

After the MES detects that the prober machine has material requirements and sends a distribution request to the central control, the electronic storage cabinet analyzes the work order. Then, it sends the corresponding materials delivery order to the robot FMS. After that, the Oasis 600C's robotic arm will grab the full cassette of the cabinet onto the robot, transports it to the prober machine, and swap the empty FOUP out of the prober from the production position of the prober machine. 

To achieve the above, The 600C-SRA compound robot adopts Lazer SLAM navigation, which is exceptionally safe and dependable and allows for complete flexibility, dynamic route planning, easy installation, and safe and collaborative interaction with operators without requiring changes to existing infrastructure.

Furthermore, the Oasis 600C-SRA robot is a master in industrial connection, allowing all AMR fleets to be linked to the rest of the production lines, devices, machines, and factory management systems. Interacting with elevators, automated doors, and alarm systems is also feasible to synchronize AMR activities. The computer system is separated into modules that carry out all instructions, control the priority of the robot's movements, and handle two-way communication with all factory features and management systems like WMS.