Since 2020, a well-known domestic semiconductor wafer manufacturing company has invested nearly 50 Stander latent and composite AMRs in multiple factories, realizing the automatic handling and intelligent management of the entire factory production logistics, bringing the entire production intelligence to a new level.
In the wafer manufacturing workshop of the company, Standard Robots has targetedly planned a flexible logistics solution with composite robots handling wafer box loading and unloading, E-Rack storage location management, and RIoT intelligent scheduling as the core, based on the loading and unloading docking, handling frequency, and wafer characteristics of different machines in the workshop.
This project covers the entire wafer manufacturing workshop, involving the docking of materials to be processed with E-Rack, the loading and unloading of wafer boxes in each process, and the flow between process links.
Challenges
01
There are 7 major processes involved, with many docking equipment and machines, and the process is complicated. AMR must accurately deliver materials.
02
The space in the workshop is narrow, and people and vehicles are mixed, so safe obstacle avoidance is required.
03
Wafer is fragile and valuable, so the robot must ensure stable operation and low vibration.
04
The wafer manufacturing workshop has high cleanliness requirements, and AMR needs to meet high cleanliness standards.
Solution
The project covers seven major processes: oxidation diffusion, photolithography, etching, thin film deposition, ion implantation, cleaning and polishing, and metallization. AMR can efficiently, accurately and flexibly complete the whole process automation of wafer handling, transfer, loading and unloading.
